00 微奈米機電系統產品與應用(MEMS/MST product and application)
01~05 微機電系統技術介紹 (Introduction to MEMS/MST)
01-1~5基礎半導體製程 (Basic semiconductor/IC process)
02體型微加工 (Bulk micromachining)
03面型微加工 (Surface micromachining)
04 LIGA／LIGA-like 製程 (LIGA/LIGA-like technology)
05 CMOS微加工 (CMOS micromachining)
06 整合技術與實例說明(Integration and case study of MEMS technology)- 教師(teacher): 鍾震桂